DESIGN, SIMULATION AND ANALYSIS OF RF MEMS SWITCH

Abstract

The main objective of the paper is to design, simulate and analyze the RF MEMS switch. In this paper, we have designed a model of an RF MEMS switch which consists of a thin micro-mechanical bridge over a suspended dielectric layer. The bridge is collapsed onto the dielectric layer by appliance of DC voltage which is greater than the pull_in voltage across the switch due to the increase in the capacitance across the device. When the bridge comes into contact with the dielectric a contact force of penalty based is implemented the contact force model of the switch. This RF MEMS switch has the low power consumption, smaller size, an IC compatible design and lower loss. The RF MEMS switch design has been done by using a Multiphysics tool i.e. COMSOL 4.3a. In the analysis of the cantilever based RF MEMS switch, we have observed the potential thermal stresses and deflection of the cantilever due to the contact forces.